ScioSense launched a single-chip pressure sensor based on CMOS-MEMS technology

ScioSense has launched an ultra-low power pressure sensor with a built-in temperature sensor in a compact package - ENS220, which can provide excellent measurement speed, resolution and accuracy.

The sensor is housed in an industry-leading 2.0mm×2.0mm size LGA package and is suitable for mobile and wearable devices such as smart watches and wristbands, GPS navigation systems, and personal health monitoring devices.

The relative pressure measurement accuracy of ENS220 reaches ±2.5Pa, which is equivalent to the accuracy of ±21cm at a height difference of 83m when converted to altitude or altitude; when using the highest sampling rate, the typical noise level is 0.85Pa (RMS). Combined, the two can detect height changes as small as 7cm, making them suitable for indoor navigation and positioning, activity tracking and fall detection applications.

These applications benefit from the high-speed sampling, low noise, high resolution and high precision of the ENS220. The measurement resolution is as high as 1/64Pa, and the output data rate can be configured by the user, up to 1kHz, which is convenient for customers to achieve the best balance between delay and power consumption. The high precision of the ENS220 under high-speed sampling makes it especially suitable for applications such as fall detection that require continuous high-speed measurement of small changes with high accuracy.

The power consumption of ENS220 is extremely low. When the rated power supply voltage is 1.8V and the sampling rate is 1KHz, the working current is less than 80µA; when sampling once per minute, the working current is only 0.8µA; in standby mode, the working current is 0.1µA.

New CMOS-MEMS integrated single-chip architecture

Bringing a new technical route to small surface mount pressure sensors, ENS220 is a major technological innovation in the field of pressure sensors. Traditional pressure sensors are generally packaged by two independent units of MEMS sensing and ASIC circuits through connecting wires. The unique feature of ENS220 is that both MEMS sensing and ASIC circuits are implemented on the same CMOS die, which is a single chip ( Monolithic) solution.

The CMOS-MEMS single-chip architecture eliminates the parasitic parameters generated at the interface between MEMS and CMOS in traditional sensors. In addition, through the CMOS-MEMS architecture, ScioSense can perfectly match the capacitance of the pressure film to the capacitance of the signal processing circuit, minimizing the noise of internal circuits (including 24-bit ADC). The main benefits brought about by this are:

• lower noise floor

• higher sensitivity

• smaller size

• lower manufacturing costs

The ENS220's built-in temperature sensor has a resolution of 8mK and an accuracy of ±0.2K, ensuring reliable temperature compensation of the pressure output within the measurement range of 300hPa to 1,200hPa (-40°C to 85°C).

Dirk Enderlein, CEO of ScioSense, said: "ENS220 is a major breakthrough in the pressure sensor market for many years. Compared with traditional MEMS pressure sensors, ScioSense implements the entire sensor and circuit in CMOS, which greatly reduces the noise floor and improves sensitivity and performance. Reduced conversion time. For applications that require high accuracy, high precision altimetry or elevation measurements at high sampling rates, the ENS220 should be the pressure sensor of choice."

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