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New Swagelok ALD7 Ultrahigh-Purity Valve

2023-08-24 17:16:31

Swagelok today announced the launch of the Swagelok® ALD7 ultrahigh-purity (UHP) diaphragm valve—a product that provides semiconductor manufacturers with the consistency and long life necessary to increase chip yields. The ALD7 offers better flow consistency, capacity, and actuator speed than Swagelok's current top-of-the-line ALD6 valve.

ALD7 valves can be integrated into new or existing equipment, providing higher flow capacity (up to 0.7 Cv) in the same 1.5-inch (38.1mm) installation as existing valves, helping manufacturers meet global requirements for advanced technology Strong demand for chips. The ALD7 valve provides precise feeding through hundreds of millions of ALD (atomic layer deposition) production cycles by performing faster and more consistently than its predecessor, the ALD6. The opening and closing response time of this actuator can be lower than 5ms. The actuator is submersible to 150°C (302°F) ambient, while the valve body is rated to 200°C (392°F), allowing the valve to better support low vapor pressure precursors that require high temperature delivery. This gives manufacturers the control they need to increase throughput and yield.

The compact design of the ALD7 valve with integrated thermal isolator enables system designers to maximize the limited space near the reaction chamber of chip fabrication equipment. The valve is also highly resistant to the aggressive gases used in the ALD process, and its body is constructed of Swagelok's proprietary ultrahigh-purity 316L VIM-VAR stainless steel. As a result, semiconductor equipment manufacturers can rely on the ALD7 valve to provide consistent performance under variable process conditions, increasing throughput for customers without increasing operating costs.

"Since developing the industry's first application-compliant ALD valve nearly 20 years ago, we have been working with semiconductor customers to better understand how our ultra- high-purity valves,” explained Ben Olechnowicz, Swagelok product manager. “This has led us to pursue innovative thinking and develop valves that perform faster, are used in more extreme conditions, and have higher flow coefficients to meet the ongoing requirements of the atomic layer process. We designed the ALD7 to be a reliable all-weather Producing valves that meet all of these requirements provides our customers with the necessary consistency of performance to stay ahead in an industry that always seems to be changing and demanding more from manufacturers."

The ALD7 is currently available in a modular surface-mount configuration with a high-flow C-seal, or a straight-through configuration with tube butt weld and Swagelok VCR® face seal fitting end connections. High temperature electronic position sensors, optical position sensors or solenoid pilot valve configurations are also available as additional elements.

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